Manufacturing Technology 2017, 17(4):635-639 | DOI: 10.21062/ujep/x.2017/a/1213-2489/MT/17/4/635

The Graphene Oxide Spincoating Optimalization by Planned Experiment

Radim Zahradnicek1, Tomas Prokes2, Libor Benes3
1 The Faculty of Electrical Engineering and Communication, Brno University of Technology, Technická 3058/10, 616 00 Brno. Czech Republic
2 The Faculty of Mechanical Engineering, Brno University of Technology, Technická 2, 616 69 Brno. Czech Republic
3 Faculty of Production Technology and Management, J. E. Purkyne University in Usti nad Labem. Pasteurova 3334/7, 400 01 Usti nad Labem. Czech Republic

Spin coating is basic method for preparation of thin polymer resist layer (polycarbonate) or colloidal solution (grapheme oxide in alcohol). This method main benefits are speed of preparation and the possibility of tuning final coating of silicon sample by variations of parameters such as the speed of rotation, time and the amount of the solution. To find out the exact graphene oxide layer spin coating process a planned experiment was designed. The greatest coverage of the silicon sample grapheme was obtained by studying the data obtained from electron microscopy (SEM) and light microscopy (LM) of the spin coating input conditions

Keywords: Graphene oxide, spin coating, Design of Experiment, Analysis of Variance, response surface

Published: September 1, 2017  Show citation

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Zahradnicek R, Prokes T, Benes L. The Graphene Oxide Spincoating Optimalization by Planned Experiment. Manufacturing Technology. 2017;17(4):635-639. doi: 10.21062/ujep/x.2017/a/1213-2489/MT/17/4/635.
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