RT Journal Article SR Electronic A1 Štaffenová, Nikoleta A1 Bajtošová, Lucia A1 Chochoľaková, Elena A1 Hanuš, Jan A1 Cieslar, Miroslav T1 Formation of TiO2 Hollow Nanoparticles Studied by in Situ TEM JF Manufacturing Technology Journal YR 2025 VO 25 IS 6 SP 788 OP 793 DO 10.21062/mft.2025.079 UL https://journalmt.com/artkey/mft-202506-0004.php AB Hollow TiO₂ architectures are attractive for catalysis and sensing but typically produced by wet-chemical templating and sub-micron sizes. Here we demonstrate a dry, template-free route to nanoscale hollow shells by combining DC magnetron sputtering with in situ TEM heating. Heating to 900 °C produces sub-50 nm TiO₂ hollow shells with ~20 nm compact walls via oxidation-driven Kirkendall hollowing. The oxide evolves from amorphous at low temperature to anatase locally (~500 °C) and then to a rutile/brookite mixture by ~600 °C. The hollow architecture withstands a temperature of 900 °C without measurable sintering. Beam-off regions and ex-situ air annealing show the same hollowing and phase evolution, confirming a thermally driven, not beam-induced, transformation reproducible in air.